Equipment Library · 资料更新 2026-08-31Equipment Library · Updated 2026-08-31

五款桌面设备，按样品尺寸和工艺动作选。Five benchtop tools, routed by sample size and process step.

4 英寸与 6 英寸匀胶、6 英寸喷淋显影，以及两档加热面积。页面参数来自供应方正式规格书；微纳Hub负责把需求整理成可确认的设备配置。4-inch and 6-inch coating, 6-inch spray developing, and two hot-plate sizes. Specifications are traced to formal supplier sheets; MN Fab Hub helps turn requirements into a confirmable configuration.

查看五款型号View Models 发送选型需求Send Requirements

5款正式型号documented models

4” / 6”匀胶尺寸梯度coating sizes

3路显影/冲洗/吹干develop/rinse/dry paths

120 / 160 mm加热区两档heating areas

Model SelectionModel Selection

先锁定尺寸，再看精度、化学体系与选配。Lock the size first, then review control, chemistry and options.

实物图来自本次供应方规格书。最高转速均按相应规格书的空载条件表述。Product images are taken from the supplied specification sheets. Maximum speeds are stated under the listed no-load conditions.

喷淋显影 · 最大 6 英寸Spray developer · up to 6 inch

SMD-DT150

桌面式半自动 6 英寸显影机Benchtop semi-automatic 6-inch developer

把显影液喷淋、纯水冲洗和氮气吹干放进同一套可编程流程，CUP 可拆卸清洗，适合研发小批量与多工艺迭代。Combines developer spray, DI rinse and nitrogen drying in a programmable flow with a removable CUP for R&D batches.

基片Substrate: 6 英寸及以内Up to 6 inch
主轴Spindle: 12000 rpm 空载no-load
喷淋Spray: 显影液 / 纯水 / 氮气Developer / DI / N₂
程序Recipes: 10 × 10 步steps

可按项目确认：背洗、多通道药液、异形载物盘、厂务纯水、加强排风和废液方案。Project options: backside rinse, extra chemical lines, custom holders, facility DI, exhaust and waste handling.

紧凑匀胶 · 最大 4 英寸Compact coater · up to 4 inch

SMC-SPIN100ii

4 英寸小型匀胶机4-inch compact spin coater

适合手套箱、通风橱和有限台面空间；腔体可取下清洗，并配随弃式内衬。Designed for gloveboxes, fume hoods and limited benches, with a removable bowl and disposable liner.

转速Speed: 12000 rpm
程序Recipes: 100 × 100 步steps
尺寸Footprint: 200 × 260 × 220 mm

自动滴胶与 4 英寸直接对中卡盘需按配置确认。Automatic dispensing and a 4-inch centering chuck require configuration confirmation.

闭环匀胶 · 碎片至 6 英寸Closed-loop coater · fragments to 6 inch

SMC-SPIN150ii

6 英寸高精密匀胶机6-inch precision spin coater

闭环 PID 转速控制覆盖 10 mm 碎片至 6 英寸晶圆，适合更重视稳定性和后续自动化扩展的研发场景。Closed-loop PID speed control covers 10 mm fragments through 6-inch wafers for higher-stability R&D and future automation.

转速Speed: 100-12000 rpm 空载no-load
加速度Acceleration: 100-30000 rpm/s
程序Recipes: 100 × 100 步steps

可选自动滴胶、原位角；废液直排/随弃式内衬与上盖形式二选一。Optional dispensing and in-situ angle; waste and lid configurations are selected per project.

精密加热 · 120 mm 区域Precision heating · 120 mm area

PvH-mini4

迷你加热台Compact hot plate

加热区Heating area: 120 × 120 mm
恒温区Uniform area: 100 × 100 mm
温区Range: 室温-300 ℃Ambient-300 ℃

30 段程序；400 ℃扩展和观察视窗需确认。30 program segments; 400 ℃ extension and viewing window require confirmation.

精密加热 · 160 mm 区域Precision heating · 160 mm area

PvH-mini6

高精密加热台Precision hot plate

加热区Heating area: 160 × 160 mm
恒温区Uniform area: 150 × 150 mm
温区Range: 室温-300 ℃Ambient-300 ℃

30 段程序；更大尺寸定制、400 ℃扩展和观察视窗需确认。30 program segments; larger custom sizes, 400 ℃ extension and viewing window require confirmation.

Quick CompareQuick Compare

不要先问“哪台最好”，先问“哪台对得上”。Do not ask which is best; ask which one fits.

型号Model	对象Target	主参数Key range	先确认Confirm first
SMD-DT150	6 英寸及以内显影Develop up to 6 inch	三路喷淋，10 × 10 步3 spray paths, 10 × 10 steps	药液、排风、废液、气源Chemistry, exhaust, waste, gas
SMC-SPIN100ii	4 英寸以内匀胶Coat up to 4 inch	12000 rpm, 100 × 100	卡盘、真空、滴胶Chuck, vacuum, dispense
SMC-SPIN150ii	碎片至 6 英寸匀胶Fragment to 6 inch coating	100-12000 rpm, PID	废液、上盖、自动化Waste, lid, automation
PvH-mini4	小尺寸加热/烘胶Compact bake/heating	120 × 120 mm, 300 ℃	样品面积、气流、程序Area, airflow, program
PvH-mini6	更大面积加热/烘胶Larger-area bake/heating	160 × 160 mm, 300 ℃	样品面积、气流、功率Area, airflow, power

询价前准备Before Enquiry

六项信息，足够开始判断。Six inputs are enough to start.

样品材料、形态、最大和最小尺寸Material, form and size range
目标工艺及胶液、显影液或其他材料Target process and chemicals
使用频率与现有设备痛点Usage and current pain points
安装环境、排风、排液、真空和气源Installation, exhaust, waste, vacuum and gas
预算范围与期望交期Budget and timeline
需要单机还是成套配置Standalone or combined setup

合作边界Scope

参数有出处，承诺有条件。Traceable specifications, conditional commitments.

本页为合作设备的选型与采购资源对接，不代表微纳Hub自研自产。价格、交期、安装、培训、质保和验收以供应方确认、技术协议及合同为准；选配和定制项需要单独核价。This page supports selection and sourcing of partner equipment; it does not claim in-house manufacturing. Pricing, lead time, installation, training, warranty and acceptance remain subject to formal confirmation and contract.

发送样品与工艺信息Send Sample & Process 提交完整需求Full Request Form