集成与后道Integration & finishing

表征与测试Metrology & testing

用形貌、膜厚、成分、电学或光学测量验证目标。Topographic, thickness, compositional, electrical and optical measurements check the intended result.

关键区别Key distinction

示意动画不替代 SEM、AFM、椭偏或电学实测数据。An animation cannot replace measured SEM, AFM, ellipsometry or electrical data.

项目输入Project inputs

验收指标、测量位置、样本数量与不确定度Acceptance criteria, measurement locations, sample count and uncertainty.
整理项目需求Prepare a project brief ↗

进一步阅读Further reading

相关技术专题Related technical topic ↗
Utah Nanofab:表征与测试方法 ↗

动画为非等比例原理示意,粒子、颜色、光路及材料厚度为解释性表达,不是测量结果或设备参数。Animation is not to scale. Particles, colors, optical paths and thicknesses are explanatory, not measurement results or tool parameters.